Optical Lithography (MJB3)

Responsible Researcher: Newton Frateschi
Department: Laboratory for Device Research (LPD)
Contact e-mail: morasal@ifi.unicamp.br

 

Service/Process Description:
Performs complete photoengraving process (spreading, exposure and developing) with maximum resolution of 2 𝛍m.

What customer requirements will be needed to perform the service? (Limitations on sample dimensions and materials, throughput rates, etc.):
The process can only be performed on samples up to 3″ in size.

What product will be delivered by the service? (report with parameters, design file, experimental results, etc):
Processed sample.

What is the delivery time for the product?
To be agreed upon, depending on the degree of difficulty.

How much will I be charged for the service?
Negotiable.